(National Key Laboratory for Remanufacturing, Academy of Armored Force Engineering, Beijing 100072, China)
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Abstract:
Multilayer film can improve the strength, elastic modulus and toughness of materials markedly, the performance of film will be significantly improved if multilayer period is reduced to nanometer scale. This paper studied the toughening and strengthening of ZrN/Cu nano multilayer film, ZrAlN composited film and ZrAlN/Cu nano multilayer film, the morphology of films were investigated by FESEM, the microstructure was studied by XRD, XPS and TEM.