1061 Abstract
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Research Progress of Additive Elements on the Properties of AZO Thin Films

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MATERIALS CHINA[ISSN:1674-3962/CN:61-1473/TG]

Issue:
2013年第12期
Page:
752-759
Research Field:
特约研究论文
Publishing date:

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Title:

Research Progress of Additive Elements on the Properties of AZO Thin Films

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PACS:
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DOI:
10.7502/j.issn.1674-3962.2013.12.07
DocumentCode:

Abstract:

In recent ye ars , some researchers ha ve carried out many studies on Al doped ZnO thin films with additive elements and found that the properties of AZO thin films with additive element s we re better than th ose of AZO thin films . The research achie v ements mentioned above were summarizedand thebasic structure and optoelectronic propertiesof AZO thin films were introduced in the paper. Thebasic structure and optoelectronic propertiesof AZO thin films with additive elements were described and compared with those of AZO thin films. The main preparation technology and advancement of additive elements doped AZO thin films were reported and the developments and the research trends of additive elements doped AZO thin films wereprospected.


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Last Update: 2014-03-20