(State Key Laboratory of Precision Measuring Technology & Instruments, Centre of MicroNano Manufacturing Technology, Tianjin University, Tianjin 300072, China)
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DOI:
10.7502/j.issn.1674-3962.2013.12.06
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Abstract:
The research progress of diamond cutting tools’ development based on Focused Ion Beam (FIB) processing technology was outlined in this paper. Firstly, the research background and manufacturing progress of diamond cutting tool was introduced. Aiming at the diamond tool core parameters of cutting edge radius, edge shape accuracy, the researchers carried out the FIB method and process optimization, which achieved the diamond tool with edge radius of 15 ~ 22 nm. Then, the applications on FIB-based diamond tools were presented from the two aspects of micro cutting mechanism and micro-nano optical component manufacturing. Finally, future developments in this field were discussed, including, how to effectively improve the FIB manufacturing efficiency and widen the application developments.