As a typical thermo-induced phase change material, vanadium dioxide (M/R phase) has wide applications in many fields. Since its phase transition temperature is low, the high temperature metal-low temperature semiconductor completely reversible phase transition could occur only at about 68 ℃, and its photoelectrical properties will change significantly after phase transition. It could be used to design many kinds of nearinfrared and midinfrared application devices, such as “smart windows”, optical devices, military protection devices, etc., which is very practical significance in real lives.Advantages and disadvantages of thermochromic properties of vanadium dioxide depend largely on the synthesis method and the control of the parameters in the preparation process of the films. Firstly, the phase transition mechanisms of the vanadium dioxide were summarized, then, the latest progresses in the preparation of vanadium dioxide thin films were discussed, including magnetron sputtering, pulsed laser deposition, sol-gel, molecular beam epitaxy, and solvothermal/hydrothermal method, etc. The advantages and disadvantages of various preparation technologies were also discussed. In addition, in terms of improving the thermochromic properties of the films, the effects of doping and compositing processes on materials and films were also summarized. Finally, a summary and outlook were made by discussing existing problems in preparation of vanadium dioxide films and future directions of related research and application.