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Abstract
Growth of 450 mm CZ Si Single Crystal of IC Grade(PDF)
MATERIALS CHINA[ISSN:1674-3962/CN:61-1473/TG]
- Issue:
- 2010年第10期
- Page:
- 21-24
- Research Field:
- 特约研究论文
- Publishing date:
Info
- Title:
- Growth of 450 mm CZ Si Single Crystal of IC Grade
- Author(s):
- DAI Xiaolin; CHANG Qing
- Semiconductor Materials Co, Ltd, GRINM，Beijing 100088，China
- Keywords:
- -
- CLC:
- PACS:
- -
- DOI:
- -
- DocumentCode:
- Abstract:
- -
Last Update: 2010-12-20