Electron beam cold hearth melting (EBCHM) is one of the newest technologies in the field of material metallurgy and plays an important role in aviation industry and national defense technology. In this paper, the principle of EBCHM technology is described, and the development of electron gun and cold hearth of EBCHM equipment are discussed. The latest research and production status applied in the fields of materials in recent years are reviewed, especially the methods to control EBCHM process in the smelting and refining of refractory metals such as titanium and vanadium, superalloy nickel and solar polycrystalline silicon in order to remove impurities, avoid segregation and homogenize composition are introduced. The research status and melting capacity in China are compared with that in other countries. Finally, the tendency combined with national demand of EBCHM is also prospected, so as to provide reference for further industrial application of EBCHM in the future.