原子分辨率能谱技术在先进功能材料研究中的应用-中国材料进展

文章信息/Info

Title:: Application of Atomic Resolution Energy Dispersive X-ray Spectroscopy in Advanced Functional Materials

作者:: 郑赟喆1; 黄荣1; 2; （1. 华东师范大学极化材料与器件教育部重点实验室，上海 200241）（2. 山西大学极端光学协同创新中心，山西太原 030006）

Author(s):: ZHENG Yunzhe1; HUANG Rong1; 2; （1. Key Laboratory of Polar Materials and Devices (MOE)， East China Normal University， Shanghai 200241, China）（2. Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China）

Keywords:: transmission electron microscope; EDS; atomic resolution; functional materials

摘要:: 从原子尺度揭示材料的微观结构及其对应的化学成分是深刻理解材料构效关系和进行材料宏观物性调控的前提和基础。基于球差校正扫描透射电子显微镜(Cs-STEM)能谱(energy dispersive X-ray spectroscopy, EDS)技术的原子尺度化学成像是目前研究固态晶体材料微结构及成分的一种强有力的工具。首先概述了原子分辨率EDS技术的基本原理和前沿技术进展，然后以原子分辨率EDS在揭示LaAlO3-SrTiO3铁电固溶体薄膜中原子尺度的成分梯度、SmNiO3薄膜中三维Ruddlesden-Popper层错网络、Ge2Sb2Te5相变存储材料在热退火过程中的元素迁移、氧化物晶界处溶质的有序偏析和Cu-Zn-Sn-S热电陶瓷中独特的纳米畴结构为例，展示了该技术在先进功能材料研究中的应用场景和分析方法。最后，基于原子分辨率EDS技术的现状对其发展方向进行了展望。

Abstract:: Revealing the structure and chemical composition of materials at atomic scale is the basis and prerequisite for understanding the structure-property relationship of materials and tailoring their physical properties. Atomic scale chemical imaging based on energy dispersive X-ray spectroscopy (EDS) in Cs-corrected scanning transmission electron microscope has been the most powerful tool for studying the microstructure of solid crystal materials. In this paper, we first introduce the basic principle and frontier progress of atomic resolution EDS. Then, we take the application scenarios of atomic resolution EDS in revealing the atomic scale composition gradient in LaAlO3-SrTiO3 ferroelectric solid solution thin films, three-dimensional Ruddlesden-Popper fault networks in SmNiO3 thin films，the atomic migration in the phase change storage material Ge2Sb2Te5，the ordered segregation of solutes at oxide grain boundaries and the unique nanodomain structure in Cu-Zn-Sn-S thermoelectric ceramics as examples to demonstrate the analysis methods. Finally, the future development of the atomic resolution EDS is prospected.