Corrosion Resistance Mechanism of TaC-Coated Graphite in High-Temperature Silicon-Containing Steam Environments-中国材料进展

文章信息/Info

Title:: Corrosion Resistance Mechanism of TaC-Coated Graphite in High-Temperature Silicon-Containing Steam Environments

作者:: Kui HAO; Caixia HUO; Shuo YU; Jianxin TU; Le SUN; Maolan YU; Ruicheng BAI; Fangzhou ZHANG; Aijun LI; Haoran LI

Author(s):: Kui HAO; Caixia HUO; Shuo YU; Jianxin TU; Le SUN; Maolan YU; Ruicheng BAI; Fangzhou ZHANG; Aijun LI; Haoran LI; School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China

Abstract:: High-purity graphite is extensively utilized in the semiconductor industry. Enhancing its corrosion resistance is crucial for reducing the manufacturing costs of the third-generation semiconductors. In this study, a continuous and dense TaC coating was fabricated on the surface of graphite using CVD method. The corrosion resistance and mechanism of the coating were investigated in a high-temperature steam environment. This environment involved temperatures exceeding 2200 K and the erosion of the coating by Sicontaining mixed steam flows. The results indicated that the corrosion in the affected areas was primarily due to chemical reactions, characterized by the formation of pores and micro-cracks, whereas failure areas were dominated by mechanical delamination, which led to macroscopic defects. Moreover, the mixed high-temperature steam corrosion of the TaC coating showed preferential selectivity, resulting in a stepped corrosion morphology at the crystalline level. The surface roughness of the samples significantly increased after corrosion, from 0.36 to 5.28 μm, although the surface composition remained largely unchanged. The TaC coating provides a certain level of protection to the graphite substrate, enhancing the service life of graphite components and demonstrating promising application potential.