纳米高频软磁薄膜材料研究进展-中国材料进展

文章信息/Info

Title:: Recent Progress on Nanostructured High Frequency Soft Magnetic Thin Films

Author(s):: WANG Yicheng; ZHANG Huaiwu; LU Guangduo; BAI Feiming; (State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Scienceand Technology of China, Chengdu 610054, China)

摘要:: 由于高频软磁薄膜材料具有巨大的应用前景因此获得了人们广泛的关注。对纳米合金软磁薄膜、纳米软磁颗粒膜、多层膜以及图形化薄膜进行了分类综述，分别介绍了各类薄膜的制备方法、化学成分、微观结构特点和高频物理性能，并对影响其性能的主要因素进行了讨论。由于纳米高频软磁薄膜材料相对于传统磁性材料具有显著优势，所以纳米合金软磁薄膜有望取代铁氧体作为制作高频磁性器件的主要应用材料。由于纳米软磁颗粒膜、多层膜以及新兴的图形化薄膜具有材料结构设计和物性剪裁的自由度，因此将是今后的重点研究方向。

Abstract:: Soft magnetic thin films have attracted much attention due to their great potentials in high frequency applications. The article summarizes the recent progress of nanocrystalline alloy soft magnetic films, nanogranular soft magnetic films, multilayer films and graphical films, respectively. Special attentions were given to the film preparation techniques, the chemical composition, the microstructure and the high frequency physical properties of the different films, and the main factors affecting the magnetic and high frequency properties were also discussed. Because of the much better properties and performance, nanocrystalline alloy soft magnetic films have replaced the ferrites as the major materials used in high frequency devices. Meanwhile, nanogranular soft magnetic films, multilayer films and emerging graphical films will be the trend in future, thanks to their great freedom in designing microstructure and tailoring materials properties.