Surface properties including topography and chemistry are of great significance in deciding the response of tissue to implants. Our group has been engaged in researches on micro/nano structured biomaterial surfaces for a long time. This article reviews our series works on osteogenetic cells behavior on biomaterial surfaces with micro- and nano-structures. For micro-patterns, hydroxyapatite microgrooves were prepared by combining micro-fabrication technology and magnetron sputtering technology; TiO2 micropatterns were obtained by combining sol-gel and replica molding; Micro-patterned Ti substrates were prepared by using a through mask electrochemical micromachining and a jet electrochemical micromachining technology; Chitosan /bovine serum albumin micropatterns were prepared on functionalized Ti surfaces by micro-transfer molding combined with self-assembly. For nanostructures, titania nanotubes with various diameters and lengths were prepared by a electrochemical anodic oxidation treatment. For micro-nano hierarchical structures, titania micropores modified with nanotubes were obtained by high voltage micro-arc oxidation and low voltage anodization. In addition to consider the effects of micro-nano structure alone, the synergistic effects of struturalization and biofunctionalization of biomaterial surfaces were investigated, which were realized through layer-by-layer self-assembly and other means of biochemical modification on micro/nano structured surfaces. Finally, in vitro osteogenetic cell culture and in vivo study were conducted to investigate the biological activity of various sample. The results indicate that micro-scale topographical features promote cell adhesion, bone ingrowth and the formation of mechanical interlocking between the implant surfaces and bone tissue. The nano-scale features, including nanotubes, nanofibers and nanodots, can generate preferential interactions with a biological system at protein and cellular levels, such as cell proliferation, differentiation, and gene expression. The micro/nano hierarchical surface structures further enhance cell activity. The micro/nano structures and biofuctionalization with biomolecules and biofilms have synergistic effects on cell behaviors. These studies provide a potential new direction for the application of micro/nano technology on implant surface modification.