聚焦离子束技术制造金刚石切削刀具的研究-中国材料进展

文章信息/Info

Title:: Research Progress of Diamond Cutting Tools’ Development based on Focused Ion Beam (FIB)

Author(s):: Zongwei Xu; Wei Wu; Shaojing Zhang; (State Key Laboratory of Precision Measuring Technology & Instruments, Centre of MicroNano Manufacturing Technology, Tianjin University, Tianjin 300072, China)

摘要:: 本文概述了基于聚焦离子束（Focused Ion Beam，FIB）加工技术制备金刚石切削刀具的相关研究进展。首先介绍了金刚石刀具的研究背景和制造现状。针对金刚石刀具的刃口半径、刃形精度等核心参数，研究者开展了聚焦离子束制造方法与工艺优化研究，实现了刃口半径为15~22 nm的金刚石刀具制造。随后，从微观切削基础、微纳光学元件制造两个方面，就聚焦离子束制造金刚石刀具的应用研究进行了展开。最后从有效提高FIB制造效率、应用研究拓展等角度，对该领域未来的发展进行了展望。

Abstract:: The research progress of diamond cutting tools’ development based on Focused Ion Beam (FIB) processing technology was outlined in this paper. Firstly, the research background and manufacturing progress of diamond cutting tool was introduced. Aiming at the diamond tool core parameters of cutting edge radius, edge shape accuracy, the researchers carried out the FIB method and process optimization, which achieved the diamond tool with edge radius of 15 ~ 22 nm. Then, the applications on FIB-based diamond tools were presented from the two aspects of micro cutting mechanism and micro-nano optical component manufacturing. Finally, future developments in this field were discussed, including, how to effectively improve the FIB manufacturing efficiency and widen the application developments.