[1]周腾,陈征*,崔铮.透明氧化物半导体及其溶液法制备薄膜晶体管[J].中国材料进展,2014,(3):016-24.[doi:10.7502/j.issn.1674-3962.2014.03.03]
　Teng Zhou,Zheng Chen,Zheng Cui.Transparent Oxide Semiconductor and Its Solution Processes for Thin Film Transistor[J].MATERIALS CHINA,2014,(3):016-24.[doi:10.7502/j.issn.1674-3962.2014.03.03]
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透明氧化物半导体及其溶液法制备薄膜晶体管()
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中国材料进展[ISSN:1674-3962/CN:61-1473/TG]

卷:
期数:
2014年第3期
页码:
016-24
栏目:
特约研究论文
出版日期:
2014-03-30

文章信息/Info

Title:
Transparent Oxide Semiconductor and Its Solution Processes for Thin Film Transistor
作者:
周腾; 陈征*; 崔铮
苏州纳米技术与纳米仿生研究所印刷电子中心，江苏 苏州 215123
Author(s):
Teng Zhou; Zheng Chen; Zheng Cui
Printable Electronics Research Centre, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China
关键词:
透明导电氧化物; 透明氧化物薄膜晶体管; 溶液法加工; 印刷电子
DOI:
10.7502/j.issn.1674-3962.2014.03.03
文献标志码:
A
摘要:
透明氧化物电子材料是当今最重要的电子材料之一，其本质是一类具有高迁移率的宽带隙半导体。通过调节其组分和结构，可以大范围调节其载流子浓度，从而使其表现为半导体或者导体性质。因此，透明氧化物电子材料可用于多种器件，特别是作为半导体沟道和透明导电电极。透明导电氧化物更早成为了研究热点，并已在商业化应用中广泛使用，透明氧化物作为新一代半导体也被广泛研究，现在透明氧化物半导体已经可以实用化。在较低的温度和大气环境中，通过溶液法制备的透明氧化物表现出了较好的电子特性，因此成为了印刷电子中重要的领域。本文简要地介绍了透明导电氧化物和透明氧化物半导体晶体管的发展历程，并概述了溶液法制备透明氧化物晶体管的最新研究进展。
Abstract:
Transparent oxide is one of the most important transparent electronic materials. The nature of transparent oxide materials as semiconductors with wide band gap is their high charge mobility. Their charge carrier concentrations can be adjusted in wide range by controlling the composition and structure in oxide, making them as either semiconductors or conductors. Transparent conductive oxides in particular have been extensively studied for many years and can be found in wide range of commercial products. The low temperature processed transparent oxide semiconductor (TOS) appeared in high performance thin film transistors ten years ago. Since then TOSs have gained extensive attention as the new generation semiconductor. Owing to considerable advances in the last few years, thin film transistors based on transparent oxide semiconductors are approaching the commercial market. Particularly, the solution processed transparent oxide is among the most promising printable semiconductor materials which have displayed good electronic performance, low processed temperature and high stability in ambient atmosphere. In this paper, transparent conducting oxide including three basic oxides compounds was briefly reviewed. Then, the history of transparent oxide semiconductor was introduced. Emphasis was placed on the latest research on solution-processed TOS for printable thin-film transistors (TFT) which have demonstrated mobility up to 10 cm2V-1s-1 and on/off ratio more than 106 even at low processed temperature as low as 200℃.

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更新日期/Last Update: 2014-02-27