氮气流量对高功率脉冲磁控溅射 CrNx/CrC复合镀层耐蚀性能的影响-中国材料进展

文章信息/Info

Title:: Effect of Nitrogen Flow on Corrosion Resistance of High Power Impulse Magnetron Sputtering CrNx/CrC Composite Coating

作者:: 向君1; 曹悦悦2; 梅屹峰1 ; 王卓然1; （1. 西安理工大学，陕西西安 710054）（2. 西安理工大学材料学院，陕西西安 710054）

Author(s):: XIANG Jun1; CAO Yueyue2; MEI Yifeng1; WANG Zhuoran1; (1. Xi’an University of Technology, Xi’an 710054, China) （2. School of Materials, Xi’an University of Technology, Xi’an 710054, China)

Keywords:: high power impulse magnetron sputtering; CrNx/CrC composite coating; nitrogen flow; microstructure; corrosion resistance

摘要:: 利用高功率脉冲磁控溅射（high power impulse magnetron sputtering, HiPIMS）在单晶硅和304不锈钢基底上制备了CrNx/CrC复合镀层，并通过扫描电子显微镜(SEM)、X射线衍射 (XRD)以及浸泡法对其形貌结构、物相及耐蚀性能进行了分析，研究了氮气流量对CrNx/CrC复合镀层微观组织形貌和耐蚀性能的影响。结果表明：Cr靶在200 Hz、占空比为6%的电场条件下可以形成稳态的高功率脉冲放电；CrNx/CrC复合镀层表面由不规则的球形颗粒堆积组成，均匀紧密；CrNx/CrC复合镀层呈柱状生长，且截面可明显观察到较明显的分层界面，分别是CrC层和CrNx层；受Ar+刻蚀作用减弱的影响，随着氮气流量的增加，CrNx/CrC复合镀层的厚度和平均沉积速率先略微增加，之后再明显减小；随着氮气流量的增加，CrNx/CrC复合镀层的致密度有所增加；当氮气流量为60 mL·min-1时，镀层晶柱的间距最小，且上下层结合最紧密，耐蚀性能最好。

Abstract:: CrNx/CrC composite coatings were deposited on the substrate of single crystal silicon and 304 stainless steel by the high power impulse magnetron sputtering (HiPIMS), and the morphology structure, phase and corrosion resistance were analyzed by scanning electron microscope (SEM), X-ray diffraction technology (XRD) and immersion method. The effects of nitrogen flow on the microstructure and corrosion resistance of CrNx/CrC composite coating were studied. The results show that Cr target can form a steady pulse discharge with high power under an electric field of 200 Hz and a duty cycle of 6%. The surface of CrNx/CrC composite coating is composed of irregular spherical particles, which are uniform and compact. The CrNx/CrC composite coating grows in columnar form, and obvious stratification interfaces are observed in the cross section, which are CrNx layer and CrC layer respectively. With the increase of nitrogen flow, the thickness and average deposition rate of CrNx/CrC composite coating increase slightly and then decrease obviously due to the decrease of Ar+ etching effect. With the increase of nitrogen flow, the density of the coating increases slightly. When the nitrogen flow is 60 mL·min-1, the distance between the crystal columns of the coating is the smallest, and the upper and lower layers are most closely combined, and the corrosion resistance is the best.