添加剂元素对AZO薄膜性能的研究进展-中国材料进展

文章信息/Info

Title:: Research Progress of Additive Elements on the Properties of AZO Thin Films

摘要:: 近年来，国内外一些研究者对添加剂元素与铝元素共掺杂的ZnO薄膜开展了许多研究并发现在AZO薄膜掺入添加剂元素不仅会增强AZO薄膜的光电特性，而且还能优化其晶体结构和表面形貌，某些添加剂元素还可以提高AZO薄膜的多项性能和稳定性，这对研究AZO薄膜性能的提高提供了一个更具潜力的研究方向。文中介绍了AZO薄膜的基本结构、基本特性以及光电性能原理。重点对添加剂元素对AZO薄膜结构的研究和光电性能的研究进行了归纳和总结，并且对这些研究与AZO薄膜进行了对比。综述了添加剂元素掺入的AZO薄膜目前所报道的磁控溅射法、溶胶-凝胶法和脉冲激光法三种主要制备技术以及各自的优缺点，同时对各方法制备的添加剂元素掺入的AZO薄膜的研究进展进行了阐述。最后介绍了添加剂元素掺入的AZO薄膜在光电领域的应用，展望了其未来发展与研究趋势。

Abstract:: In recent ye ars , some researchers ha ve carried out many studies on Al doped ZnO thin films with additive elements and found that the properties of AZO thin films with additive element s we re better than th ose of AZO thin films . The research achie v ements mentioned above were summarizedand thebasic structure and optoelectronic propertiesof AZO thin films were introduced in the paper. Thebasic structure and optoelectronic propertiesof AZO thin films with additive elements were described and compared with those of AZO thin films. The main preparation technology and advancement of additive elements doped AZO thin films were reported and the developments and the research trends of additive elements doped AZO thin films wereprospected.