[1]赵瑞瑞,杨明庆,牛春晖,等.二氧化钒薄膜的制备及光电性能研究进展[J].中国材料进展,2023,42(04):353-360.[doi:10.7502/j.issn.1674-3962.202104028]
　ZHAO Ruirui,YANG Mingqing,NIU Chunhui,et al.Advances in Preparation and Photoelectrical Properties of Vanadium Dioxide Films[J].MATERIALS CHINA,2023,42(04):353-360.[doi:10.7502/j.issn.1674-3962.202104028]
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二氧化钒薄膜的制备及光电性能研究进展()
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中国材料进展[ISSN:1674-3962/CN:61-1473/TG]

卷:
42
期数:
2023年第04期
页码:
353-360
栏目:
出版日期:
2023-04-30

文章信息/Info

Title:
Advances in Preparation and Photoelectrical Properties of Vanadium Dioxide Films
文章编号:
1674-3962(2023)04-0353-08
作者:
赵瑞瑞; 杨明庆; 牛春晖; 刘力双; 郎晓萍; 吕勇
北京信息科技大学仪器科学与光电工程学院，北京 100192
Author(s):
ZHAO Ruirui;  YANG Mingqing;  NIU Chunhui;  LIU Lishuang;  LANG Xiaoping;  LV Yong
School of Instrumentation Science and OptoElectronics Engineering, Beijing Information Science and Technology University, Beijing 100192, China
关键词:
相变材料; 二氧化钒; 纳米材料; 薄膜; 掺杂
Keywords:
phase change material;  vanadium dioxide;  nanomaterial;  thin film;  doped
分类号:
TQ174
DOI:
10.7502/j.issn.1674-3962.202104028
文献标志码:
A
摘要:
二氧化钒（M/R相）作为一种典型的热致相变材料，在诸多领域都有着广阔的应用。仅在68 ℃左右便可发生高温金属相低温半导体相的完全可逆相变，且相变前后材料的光学、电学等特性均会发生明显变化。基于该特性，二氧化钒可应用于设计各种近红外和中红外调制器件，如“智能窗”、光学器件、军事防护器件等，并具有极高的实用价值。二氧化钒热致变色性能的优劣在很大程度上取决于薄膜的合成方法和制备过程中的参数调控，首先总结了关于二氧化钒相变机理的探索研究，其次重点概述了近几年二氧化钒薄膜制备方法的研究进展，包括磁控溅射法、脉冲激光沉积法、溶胶凝胶法、分子束外延法和溶剂热/水热法等，并讨论了各种制备技术的优缺点。另外，在改善薄膜的热致变色性能方面，总结概述了掺杂和复合工艺对薄膜性能的影响。最后，对二氧化钒薄膜存在的问题及其未来的研究及应用方向进行了讨论与展望。
Abstract:
As a typical thermo-induced phase change material, vanadium dioxide (M/R phase) has wide applications in many fields. Since its phase transition temperature is low, the high temperature metal-low temperature semiconductor completely reversible phase transition could occur only at about 68 ℃, and its photoelectrical properties will change significantly after phase transition. It could be used to design many kinds of nearinfrared and midinfrared application devices, such as “smart windows”, optical devices, military protection devices, etc., which is very practical significance in real lives.Advantages and disadvantages of thermochromic properties of vanadium dioxide depend largely on the synthesis method and the control of the parameters in the preparation process of the films. Firstly, the phase transition mechanisms of the vanadium dioxide were summarized, then, the latest progresses in the preparation of vanadium dioxide thin films were discussed, including magnetron sputtering, pulsed laser deposition, sol-gel, molecular beam epitaxy, and solvothermal/hydrothermal method, etc. The advantages and disadvantages of various preparation technologies were also discussed. In addition, in terms of improving the thermochromic properties of the films, the effects of doping and compositing processes on materials and films were also summarized. Finally, a summary and outlook were made by discussing existing problems in preparation of vanadium dioxide films and future directions of related research and application.

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备注/Memo

备注/Memo:
收稿日期：2021-04-21修回日期：2021-07-16 基金项目：国家自然科学基金资助项目（21607158） 第一作者：赵瑞瑞，女，1996年生，硕士研究生 通讯作者：杨明庆，男，1982年生，副研究员，硕士生导师， Email: yangmingqing@bistu.edu.cn 吕勇，男，1971年生，教授，硕士生导师， Email: lvyong@bistu.edu.cn
更新日期/Last Update: 2023-01-31